Measurement | Range | Accuracy | Resolution |
---|---|---|---|
Leak 1* | 0 ~ 2 ml/min | ±(2.5% of F + 0.003 ml/min) | 0.001 ml/min |
Leak 2* | 2 ~ 20 ml/min | ±(2.5% of F + 0.03 ml/min) | 0.01 ml/min |
Leak 3* | 20 ~ 200 ml/min | ±(2.5% of F + 0.3 ml/min) | 0.1 ml/min |
Leak 4* | 200 ~ 2,000 ml/min | ±(2.5% of F + 3 ml/min) | 1 ml/min |
Leak 5* (optional) | 2,000 ~ 20,000 ml/min | ±(2.5% of F + 30 ml/min) | 10 ml/min |
Leak 6* (optional) | 400 ~ 4,000 ml/min | ±(2.5% of F + 6 l/h) | 2 l/h |
Leak 7* (optional) | 1,000 ~ 10,000 ml/min | ±(2.5% of F + 15 l/h) | 5 l/h |
Pressure | Vacuum ~ 10 bar | ±(1.5% of F + 15 hPa) | 0.003 bar |
ATM. Pressure | 950 ~ 1050 mbar | ±1% of D +3 digits | 1 mbar |
Temperature | +15 ~ +35 ℃ | 1% | 0.1 ℃ |